Analysis of Fabrication, Testing and Deformation of Soft Concave Microlens Array

Soft concave microlens array is fabricated with soft lithography technique. The deepth, the basis diameter and the focal length of the concave microlens array are 3μm, 25μm and 64. 05μm respectively. The process flow is described in detail in this article. Metallographic microscope, profile-system and beam-profile system are employed to test the three-dimensional surface and optical properties of the mcirolens array. Test results indicate that the profile of the concave microlens array is clear, all the lens elements have uniform surface and the optical property of the array is fine. Finite element method is also used to analyse the deformation of the soft concave microlens array with distributed loads. Deformation will increase with the increase of the load,and the deformation extent of the ambient lens elements is greater than that of the medial ones.