A Novel Piezoelectric Linear Motor Driven by Two Bending Vibration Modes of a Beam with Rectangular Cross-Section

A piezoelectric linear motor powered by dual bending vibration modes of B06 and B09 of a beam with rectangular cross-section has been proposed. Six drive teeth employed to push the motor's slider are arranged on top of the beam,while two layers of high performance piezoelectric ceramics are stuck on each top of the beam. Once the working vibration modes are excited by electrical sinusoidal voltage of ultrasonic frequency applied to the piezoelectric ceramics which are polarized appropriately,the drive teeth will make the slider move forward or backward. The motor's assembly structure has been presented, the working principle of the motor has been described,and the mechanical properties of the motor have been simulated. It is concluded that this motor can generate larger thrust and move in higher speed and it has wide application prospect.