XIONG Qi, YANG Bin, LIU Yao-guang, WANG De-zhi, HUANG Ning-kang, LEI Jia-rong. XPS analysis for the C-SiC coatings before and after H+ ion irradiation[J]. Journal of nanchang hangkong university(Natural science edition), 2002, 16(3): 33-37.
Citation: XIONG Qi, YANG Bin, LIU Yao-guang, WANG De-zhi, HUANG Ning-kang, LEI Jia-rong. XPS analysis for the C-SiC coatings before and after H+ ion irradiation[J]. Journal of nanchang hangkong university(Natural science edition), 2002, 16(3): 33-37.

XPS analysis for the C-SiC coatings before and after H+ ion irradiation

  • Simulating experiments of H+ irradiation were made for the C-SiC coatings deposited by ion beam mixing on stainless steel substrates. Hydrogen depth profiles of SIMS spectra were measured for the specimen before and after H+ ion irradiation. XPS was used to analyze the chemical bonding energy for C and Si elements of coatings before and after H+ ion irradation. Relationship between the changes of the chemical bond states for the elements of the C-SiC films and hydrogen was studied. Related mechanism of hydrogen resistant property for the C-SiC coatings was discussed.
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