Effect of Bias Voltage on the Properties of TiAlN Coating by Shielded Arc ion Plating

TiAlN coating was deposited on 1Cr11Ni2W2MoV stainless steel by arc ion plating with a shielded plate in the system. The rounded plate with the same diameter as the target was placed between the Ti50Al50 alloy target and the substrate holder. The deposition was carried on under the bias voltage of 0V,150V,350V,550V,respectively. The composition,microstructure,mechanical and tribological properties of coatings were characterized by SEM(EDS),X-ray diffraction,microhardness tester and wear experiments. The results show that Ti content increases while Al content goes down in the TiAlN coating when increasing the bias voltage,the phase composition of TiAlN changes from two mixed structures to single one. moreorer,the macroparticles on the surface of coatings reduce apparently and the microhardness increases significantly. When the voltage reaches-150V,the TiAlN coating has the biggest deposition rate while has the smallest friction coefficient and wear volume,which shows the outstanding tribological properties.