LIU Zhi-huai, GONG Yong-qing, LI Ping-gui. Research on the Method of Focusing of Lithography Technology for Micro-optical Elements[J]. Journal of nanchang hangkong university(Natural science edition), 2009, 23(1): 84-86.
Citation: LIU Zhi-huai, GONG Yong-qing, LI Ping-gui. Research on the Method of Focusing of Lithography Technology for Micro-optical Elements[J]. Journal of nanchang hangkong university(Natural science edition), 2009, 23(1): 84-86.
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Research on the Method of Focusing of Lithography Technology for Micro-optical Elements

    Abstract
  • In this paper,three focusing methods in the lithography technology to manufacture micro-optical elements were presented.The resolution of the BP-218 UV photo resist,which is produced in Beijing Institute of Chemical Reagents,was tested by these methods and a satisfactory result was got.
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