Design and Finite Element Analysis of Longitudinal Vibration Ultrasonic Vibrators

Based on the inverse piezoelectric effect of piezoelectric ceramics, according to the design theory of sandwich piezoelectric ultrasonic transducer, a longitudinally vibrating ultrasonic vibrator which can be used for rotary ultrasonic milling is designed. Using PZFLex simulation software to simulate the factors affecting the resonant frequency of ultrasonic vibrator, the results show that the resonant frequency of the ultrasonic oscillator decreases with the increase of the effective length of the tool and the length of the transition cylinder, and increases with the length of the pre-tightening bolt and the depth of the rear cover hole. The longitudinally vibrating ultrasonic vibrator is processed according to the simulation results, and the impedance of the vibrator is analyzed, the resonance frequency of the real object is 17.41 kHz. Comparing to the resonance frequency of the simulation model, the predicted error of resonance frequency is 5.763 6%. Finally, based on the measured resonant frequency, the vertical amplitudes of the vibrator output is 2.016 μm respectively under the excitation of 200 V voltages, which can meet the requirements of rotary ultrasonic longitudinal vibration milling. Thus, the validity of the model provides a basis for further optimization of the ultrasonic vibrator.