Effectiveness Analysis of Transfer by Using of PDMS for Fabricating MLA with Soft Lithography Technique

In this paper, we take fabricating micro lens array as example and analyzes the effectiveness of transfer micro structure by using of PDMS in soft lithography technique. Firstly, the detail process flow for fabricating photoresist MLA, concave PDMS MLA and SU-8 MLA are introduced. Then the measurement results for the profile of the three kinds of MLA with different sizes and materials are given. The difference among the measurement results and the design values are analyzed. The result show that using PDMS transfer micro structure or using PDMS thin film as template to transfer micro structure on SU-8 surface is effective and feasible.