Abstract:
Ion implantation biological mutation effects is a new artifical mutation method different from the tradition irradiation biology.For the implantation dose determines the irradiation injury degree of biological sample,it's a important parameter that should be measured and controlled accurately in the experiment.Introduction is given to the measurement and control method of ion implantation dose of a 50keV implantation equipment,and the hardware construction and software design of controlling system are described in detail in the paper.Experimental results show that the measurement and control of implantation dose is accurate and stable.