熊器, 杨斌, 刘耀光, 汪德志, 黄宁康, 雷家荣. H+辐照前后C-SiC涂层的XPS分析[J]. 南昌航空大学学报(自然科学版), 2002, 16(3): 33-37.
引用本文: 熊器, 杨斌, 刘耀光, 汪德志, 黄宁康, 雷家荣. H+辐照前后C-SiC涂层的XPS分析[J]. 南昌航空大学学报(自然科学版), 2002, 16(3): 33-37.
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XIONG Qi, YANG Bin, LIU Yao-guang, WANG De-zhi, HUANG Ning-kang, LEI Jia-rong. XPS analysis for the C-SiC coatings before and after H+ ion irradiation[J]. Journal of nanchang hangkong university(Natural science edition), 2002, 16(3): 33-37.
Citation: XIONG Qi, YANG Bin, LIU Yao-guang, WANG De-zhi, HUANG Ning-kang, LEI Jia-rong. XPS analysis for the C-SiC coatings before and after H+ ion irradiation[J]. Journal of nanchang hangkong university(Natural science edition), 2002, 16(3): 33-37.
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H+辐照前后C-SiC涂层的XPS分析

XPS analysis for the C-SiC coatings before and after H+ ion irradiation

    摘要
  • 摘要: 对不锈钢基体上离子束混合沉积的C-SiC涂层进行了H+辐照模拟试验,由SIMS测量H+辐照前后氢的浓试分布,采用沟电子能谱(XPS)对H+辐照前后涂层元素C和Si进行了内层电子结合能的测量分析,研究C及Si的化学键态的变化与H的关系,探讨SiC涂层阻氢机理.

     

    Abstract: Simulating experiments of H+ irradiation were made for the C-SiC coatings deposited by ion beam mixing on stainless steel substrates. Hydrogen depth profiles of SIMS spectra were measured for the specimen before and after H+ ion irradiation. XPS was used to analyze the chemical bonding energy for C and Si elements of coatings before and after H+ ion irradation. Relationship between the changes of the chemical bond states for the elements of the C-SiC films and hydrogen was studied. Related mechanism of hydrogen resistant property for the C-SiC coatings was discussed.

     

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