刘智怀, 龚勇清, 李平贵. 微光学元件光刻对焦方法[J]. 南昌航空大学学报(自然科学版), 2009, 23(1): 84-86.
引用本文: 刘智怀, 龚勇清, 李平贵. 微光学元件光刻对焦方法[J]. 南昌航空大学学报(自然科学版), 2009, 23(1): 84-86.
shu
LIU Zhi-huai, GONG Yong-qing, LI Ping-gui. Research on the Method of Focusing of Lithography Technology for Micro-optical Elements[J]. Journal of nanchang hangkong university(Natural science edition), 2009, 23(1): 84-86.
Citation: LIU Zhi-huai, GONG Yong-qing, LI Ping-gui. Research on the Method of Focusing of Lithography Technology for Micro-optical Elements[J]. Journal of nanchang hangkong university(Natural science edition), 2009, 23(1): 84-86.
shu

微光学元件光刻对焦方法

Research on the Method of Focusing of Lithography Technology for Micro-optical Elements

    摘要
  • 摘要: 文章提出了三种微光学元件光刻对焦方法,并用它们对北京化学试剂研究所生产的BP-218紫外正型光刻胶的分辨率进行了测试,得到了满意的结果.

     

    Abstract: In this paper,three focusing methods in the lithography technology to manufacture micro-optical elements were presented.The resolution of the BP-218 UV photo resist,which is produced in Beijing Institute of Chemical Reagents,was tested by these methods and a satisfactory result was got.

     

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