Abstract: Aiming to improve the performance and enrich the forms of piezoelectric planar actuators, a planar actuator based on Tian Zi parallel piezoelectric stator was proposed in this paper. The left (right) in-plane bending vibration, front (rear) in-plane bending vibration, and out of plane symmetrical bending vibration of the stator were employed as the working modes. The out of plane symmetric bending vibration mode was coupled with the other two modes to make the feet on the left (right) and front (rear) bars moving in elliptical trajectories along either the xz plane or the yz plane, so as to drive the slider moving in the x and y directions. The near resonance operation mechanism of the actuator was explained, and the elliptical trajectory equation of the driving foot was derived. The overall size of the stator was planned to be 122 mm × 122 mm × 25 mm, and the optimal driving frequency was determined to be 36.113 kHz. A electromechanical coupling analysis model for the stator was established, so that the working modes shape, frequency response characteristics, and displacement vibration response of the actuator could be to simulated. A complete machine model of the actuator was established, and the frequency and voltage regulation speed characteristics of the stator were obtained. When the driving signal is 300 V and 36.113 kHz, the amplitudes in the x, y, and z directions of the driving foot were 1.2 μm, 0.9 μm, and 0.84 μm, respectively, while the x and y velocities of the moving body were 62 mm/s and 64 mm/s. This actuator is expected to be applied in the field of high-precision motion drive.