Abstract: A micro linear piezoelectric motor is designed. The motor consists of a thin rectangular stator with U-shaped opening and U-shaped disc spring mover. The motor adopts two orthogonal in-plane first-order bending vibration and out-of-plane first-order bending vibration as working modes, so that the motor works at low frequency to reduce losses. The modal analysis and parameter optimization of the motor are carried out by the multi physical field finite element simulation software COMSOL. The stator is machined by laser to reduce the error, and its size is 6 mm × 7 mm × 8 mm, the mass is only 0.21 g. The experimental results show that at 200 VPP, the frequency is 20.06 kHz and the phase difference is 90° It can provide a maximum speed of 45 mm/s and an output force of 5.3 mn under the excitation of two-phase sinusoidal voltage. The motor is small in size and light in weight, and has great potential application value in high-performance space equipment such as micro-nano satellite.