Abstract: Atom transfer radical polymerization (ATRP) nano active centers were prepared by modifying nanosilica with 3-aminopropyltriethoxysilane (KH-550) and 2-bromoisobutyryl bromide (BIB), then using ultraviolet Photo-initiated active polymerization of dodecyl fluoroheptyl acrylate was grafted onto the surface of nano-silica and deposited on the surface of the glass substrate to prepare a superhydrophobic surface. The grafting ratio of the nano-active centers was analyzed by thermal weight loss. The effects of the content of nano-active centers and photopolymerization time on the superhydrophobic properties were studied using water contact angle. The results showed that with the increase of nano-silica active center concentration, the longer it takes for photopolymerization to form superhydrophobic surface, and the process stability better. When the active center concentration of nano-silica reached 3.63 μmol/g, after 40 min light-induced living polymerization, the grafting ratio of fluoropolymer on the silica surface reaches 34.12%, the contact angle reaches 164°, and the surface of micro-nano became dense.