Abstract: Nano-silica (SiO₂) particles were prepared by low temperature microwave method. Moreover, a transparent wear-resistant hydrophobic nano-silica/fluorocarbon hybrid coating was prepared, which surface was hydrophobically modified and double-bond functional group introduced. Nano-silica particles were characterized by XRD, TEM, FTIR approaches. The effects of content of modified nano-SiO₂ on the transparency, abrasion resistance, hydrophobicity, strength, hardness and stain resistance of the hybrid coatings were investigated. The results show that the addition of modified nano-SiO₂ particles has little effect on the transparency of the hybrid coatings. The hybrid coatings exhibit excellent adhesive force, hardness, abrasion resistance, hydrophobicity and stain resistance. The optimal loading of the modified nano-SiO₂ was found to be 5%.