李凤, 高益庆, 许广涛, 崔晓峰, 况国文. PDMS在使用软光刻技术制作微透镜阵列的转印效果分析[J]. 南昌航空大学学报(自然科学版), 2014, 28(3): 71-77. DOI: 10.3969/j.issn.1001-4926.2014.03.012
引用本文: 李凤, 高益庆, 许广涛, 崔晓峰, 况国文. PDMS在使用软光刻技术制作微透镜阵列的转印效果分析[J]. 南昌航空大学学报(自然科学版), 2014, 28(3): 71-77. DOI: 10.3969/j.issn.1001-4926.2014.03.012
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LI Feng, GAO Yi-qing, XU Guang-tao, CUI Xiao-feng, KUANG Guo-wen. Effectiveness Analysis of Transfer by Using of PDMS for Fabricating MLA with Soft Lithography Technique[J]. Journal of nanchang hangkong university(Natural science edition), 2014, 28(3): 71-77. DOI: 10.3969/j.issn.1001-4926.2014.03.012
Citation: LI Feng, GAO Yi-qing, XU Guang-tao, CUI Xiao-feng, KUANG Guo-wen. Effectiveness Analysis of Transfer by Using of PDMS for Fabricating MLA with Soft Lithography Technique[J]. Journal of nanchang hangkong university(Natural science edition), 2014, 28(3): 71-77. DOI: 10.3969/j.issn.1001-4926.2014.03.012
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PDMS在使用软光刻技术制作微透镜阵列的转印效果分析

Effectiveness Analysis of Transfer by Using of PDMS for Fabricating MLA with Soft Lithography Technique

    摘要
  • 摘要: 以微透镜阵列为例,分析了在软光刻技术中使用PDMS复制微结构的有效性。首先介绍了制作光刻胶微透镜阵列,使用软光刻技术通过两次转印制作PDMS凹微透镜阵列和凸SU-8微透镜阵列工艺流程;接着叙述了使用金相显微镜和白光干涉轮廓仪对微透镜阵列样品的表面轮廓进行测量的结果,并对样品不同尺寸、不同材料的微透镜阵列样品的测量值以及这些测量值与设计值之间差异进行了分析。分析结果表明,使用PDMS转印光刻胶上的微结构以及将PDMS薄膜作为模板把微结构转印到SU-8表面均是可行的、有效的。

     

    Abstract: In this paper, we take fabricating micro lens array as example and analyzes the effectiveness of transfer micro structure by using of PDMS in soft lithography technique. Firstly, the detail process flow for fabricating photoresist MLA, concave PDMS MLA and SU-8 MLA are introduced. Then the measurement results for the profile of the three kinds of MLA with different sizes and materials are given. The difference among the measurement results and the design values are analyzed. The result show that using PDMS transfer micro structure or using PDMS thin film as template to transfer micro structure on SU-8 surface is effective and feasible.

     

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