林娜, 吴凌, 郑怡. 预镀框架铜线键合的腐蚀失效分析与可靠性[J]. 失效分析与预防, 2019, 14(3): 172-178. DOI: 10.3969/j.issn.1673-6214.2019.03.007
    引用本文: 林娜, 吴凌, 郑怡. 预镀框架铜线键合的腐蚀失效分析与可靠性[J]. 失效分析与预防, 2019, 14(3): 172-178. DOI: 10.3969/j.issn.1673-6214.2019.03.007
    LIN Na, WU Ling, ZHENG Yi. Corrosion Failure Analysis and Reliability of Copper Wire Bonding of Pre-plated Frame[J]. Failure Analysis and Prevention, 2019, 14(3): 172-178. DOI: 10.3969/j.issn.1673-6214.2019.03.007
    Citation: LIN Na, WU Ling, ZHENG Yi. Corrosion Failure Analysis and Reliability of Copper Wire Bonding of Pre-plated Frame[J]. Failure Analysis and Prevention, 2019, 14(3): 172-178. DOI: 10.3969/j.issn.1673-6214.2019.03.007

    预镀框架铜线键合的腐蚀失效分析与可靠性

    Corrosion Failure Analysis and Reliability of Copper Wire Bonding of Pre-plated Frame

    • 摘要: 集成电路预镀框架铜线键合封装在实际应用中发现第二键合点失效,通过激光开封和横截面分析,键合失效与电化学腐蚀机理密切相关。通过2 000 h高温存储试验和高温高湿存储试验,研究预镀框架铜线键合界面的湿腐蚀和干腐蚀失效模式。结果表明:在不含Cl的低湿度环境下,电化学反应速率缓慢,且金属腐蚀发生的比例低;在含有Cl的高湿环境下,电化学反应速率则大大增加,铜线和框架的腐蚀严重程度与比例最为突出;高湿度和Cl浓度加速金属界面的腐蚀,尤其是铜线的腐蚀。

       

      Abstract: The second bonding site of copper wire bonding of pre-plated frame (PPF) of IC package was found to have failed during service. Laser unsealing and cross section analysis were carried out to analyze the failure cause, and it is found that the failure is related to electrochemical corrosion. 2 000 h of high temperature storage (HTS) test and high temperature & humidity storage (THS) test were conducted to study the failure mode of dry and wet corrosion of the copper wire bonding interface of PPF. Destructive analysis shows that: In the low humidity environment without Cl ions, electrochemical reaction rate was slow, and metal corrosion probability was low. In high humidity environment containing Cl ions, reaction rate greatly increased, and the corrosion severity and probability between copper wire and frame was the most prominent. High humidity and Cl ion concentration significantly accelerated the corrosion of metal interface, especially the copper wire.

       

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