李璠, 李艳芬. 真空多弧离子镀薄膜结合力检测试验探究[J]. 失效分析与预防, 2015, 10(6): 393-396. DOI: 10.3969/j.issn.1673-6214.2015.06.012
    引用本文: 李璠, 李艳芬. 真空多弧离子镀薄膜结合力检测试验探究[J]. 失效分析与预防, 2015, 10(6): 393-396. DOI: 10.3969/j.issn.1673-6214.2015.06.012
    LI Fan, LI Yan-fen. Experiment Methods for Binding Force of Films by Vacuum Arc Deposition[J]. Failure Analysis and Prevention, 2015, 10(6): 393-396. DOI: 10.3969/j.issn.1673-6214.2015.06.012
    Citation: LI Fan, LI Yan-fen. Experiment Methods for Binding Force of Films by Vacuum Arc Deposition[J]. Failure Analysis and Prevention, 2015, 10(6): 393-396. DOI: 10.3969/j.issn.1673-6214.2015.06.012

    真空多弧离子镀薄膜结合力检测试验探究

    Experiment Methods for Binding Force of Films by Vacuum Arc Deposition

    • 摘要: 采用MIP-700多功能离子镀膜机对4Cr14Ni14W2Mo和W9Mo3Cr4V两种不同材料进行TiN镀膜处理工艺研究,并利用WS-2005自动划痕测量仪测量其结合力,试验表明膜层结合力与基体材料的硬度有关。本研究对国内外试验中"临界载荷"的定义标准及结合力的判据进行研究分析,定义了当薄膜开始出现破裂、剥落,摩擦因数急剧增大时所对应的法向载荷为试验测定的临界载荷,并以此作为膜层结合的判定指标。建立4Cr14Ni14W2Mo和W9Mo3Cr4V两种不同材料真空离子镀TiN膜结合力的试验方法和膜基结合力临界载荷评价标准。

       

      Abstract: In the present work, the TiN plating technology for the two kinds of materials of 4Cr14Ni14W2Mo and W9Mo3Cr4V was studied with a MIP-700 multifunction ion plating machine, and the binding force of the film was measured with a WS-2005 automatic scratch measuring instrument. In addition, the judgment criterion for the binding force and the definition standard of "critical load" in the world were analyzed. The normal load obtained when the film began to crack and peel off and the friction factor suddenly increased was defined as the "critical load" and considered as the judgment criterion of the film binding force. Based on the above results, the experiment methods and critical load judgment criterion for the binding force of the film plated on 4Cr14Ni14W2Mo and W9Mo3Cr4V by vacuum arc deposition were worked out.

       

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